†††††††††††††††††††††††††† ES 464/ES 564: Electrochemical and Corrosion Engineering

Spring 2012

 

Catalog Data:††††††††††† ES 464/ES 564 Electrochemical and Corrosion Engineering.

 

Quantitative understanding of the kinetics and thermodynamics of electrochemical reactions. Commercial applications of electrochemistry in the fields of microelectronic circuit fabrication, biotechnology, and alternative energy. The nature of corrosion, how it relates to the fundamentals of electrochemistry, and the means by which it can be controlled by allow selection, cathodic protection, and protective coatings.

 

Prerequisites: CM 132.

 

Textbooks:†††† Allen J. Bard and Larry R. Faulkner, Electrochemical Methods, Fundamentals and Applications, 2nd ed. (New York, John Wiley and Sons, 2001).

Denny A. Jones, Principles and Prevention of Corrosion, 2nd ed. (Upper Saddle River, NJ, Prentice Hall, 1996).

 

You should also investigate the Interconnect chapter from the following sites:

 

http://www.itrs.net

http://www.itrs.net/Links/2009ITRS/2009Chapters_2009Tables/2009_ExecSum.pdf

http://www.itrs.net/Links/2009ITRS/2009Chapters_2009Tables/2009_Interconnect.pdf

http://www.itrs.net/Links/2010ITRS/IRC-ITRS-MtM-v2%203.pdf

The International Technology Roadmap for Semiconductors (ITRS) is published by the (SIA) Semiconductor Industry Association (www.semichips.org), a consortium of semiconductor companies.The ITRS provides research and development guidelines for people working in both industry and academia to ensure that future technological challenges can be met.Electrochemistry is used for Interconnect fabrication by Cu electrodeposition.In addition, Cu and Ta chemical mechanical planarization (CMP) are both essentially controlled corrosion processes.

 

Class Time:††† TTh 8:00-9:15, SC 320.

 

Instructor:††††† Ian Suni (CAMP 236, x4471, isuni@clarkson.edu)

 

Office hours:MW, 9:00-11:30

 

Course site:††† www.clarkson.edu/~isuni/course464.htm

 

Topical Outline:

 

Introduction††††††††††††††††††††††††††††††††††††††††††††††††††††††††††††††† Examples from Prof. Suniís laboratory

††††††††††† Potentials and Thermodynamics of Cells:††††††††††††††††† Chapter 2, Bard and Faulkner

††††††††††† Kinetics of Electrode Reactions:††††††††††††††††††††††††††††††† Chapter 3, Bard and Faulkner

††††††††††† Mass Transfer by Migration and Diffusion:†††††††††††††† Chapter 4, Bard and Faulkner

††††††††††† Basic Potential Step Methods:††††††††††††††††††††††††††††††††††† Chapter 5, Bard and Faulkner

††††††††††† Potential Sweep Methods:††††††††††††††††††††††††††††††††††††††††† Chapter 6, Bard and Faulkner

††††††††††† Methods Involving Forced Convection:†††††††††††††††††††† Chapter 9, Bard and Faulkner

††††††††††† Techniques Based on Concepts of Impedance:††††††††† Chapter 10, Bard and Faulkner

 

††††††††††† Case study:††† Cu Electrodeposition into Deep Submicron Interconnects

††††††††††† Case study:††† Water Electrolysis

†††††††††††

††††††††††† The Technology and Evaluation of Corrosion:†††††††††† Chapter 1, Jones

††††††††††† Pourbaix Diagrams††††††††††††††††††††††††††††††††††††††††††††††††††††† Chapter 2.2, Jones

††††††††††† Mixed Potential Theory††††††††††††††††††††† ††††††††††††††††††††††† Chapter 3.3, Jones

††††††††††† Passivity††††††††††††††††††††††††††††††††††††††††††††††††††††††††††††††††††††† Chapter 4, Jones

††††††††††† Polarization Methods to Measure Corrosion Rate:†††† Chapter 5, Jones

††††††††††† Galvanic and Concentration Cell Corrosion†††††††††††††† Chapter 6, Jones

††††††††††† Pitting and Crevice Corrosion††††††††††††††††††††††††††††††††††††††††††††††† Chapter 7, Jones

††††††††††† Atmospheric Corrosion and Elevated Temperature Oxidation:

††††††††††††††††††††††††††††††††††††††††††††††††††††††††††††††††††††††††††††††††††††††††††††††† Chapter 12, Jones

††††††††††† Cathodic Protection:†††††††††††††††††††††††††††††††††††††††††††††††††† Chapter 13, Jones

††††††††††† Coatings and Inhibitors:†††††††††††††††††††††††††††††††††††††††††††† Chapter 14, Jones

 

Case study:††† Cu and Ta Planarization Methods for Deep Submicron Interconnects

††††††††††† Case study:††† Corrosion in Extreme Environments

 

Evaluation Methods:

 

Homework will be assigned but not collected and graded.Grades will be distributed based on z-scores, which measures the number of standard deviations students perform above or below the means:

 

 

††††††††††††††††††††††† Midterm examination25%

††††††††††††††††††††††† Final examination††††††† 25%

††††††††††††††††††††††† Research paper††††††††††† 25%

††††††††††††††††††††††† Research paper††††††††††† 25%

 

Exam Policy:Open book and notes, no make-up exams.