ES 464/ES 564: Electrochemical and Corrosion Engineering

Spring 2012

 

Catalog Data:            ES 464/ES 564 Electrochemical and Corrosion Engineering. 

 

Quantitative understanding of the kinetics and thermodynamics of electrochemical reactions. Commercial applications of electrochemistry in the fields of microelectronic circuit fabrication, biotechnology, and alternative energy. The nature of corrosion, how it relates to the fundamentals of electrochemistry, and the means by which it can be controlled by allow selection, cathodic protection, and protective coatings.

 

Prerequisites: CM 132. 

 

Textbooks:     Allen J. Bard and Larry R. Faulkner, Electrochemical Methods, Fundamentals and Applications, 2nd ed. (New York, John Wiley and Sons, 2001). 

Denny A. Jones, Principles and Prevention of Corrosion, 2nd ed. (Upper Saddle River, NJ, Prentice Hall, 1996). 

 

You should also investigate the Interconnect chapter from the following sites:

 

http://www.itrs.net

http://www.itrs.net/Links/2009ITRS/2009Chapters_2009Tables/2009_ExecSum.pdf

http://www.itrs.net/Links/2009ITRS/2009Chapters_2009Tables/2009_Interconnect.pdf

http://www.itrs.net/Links/2010ITRS/IRC-ITRS-MtM-v2%203.pdf

 

The International Technology Roadmap for Semiconductors (ITRS) is published by the (SIA) Semiconductor Industry Association (www.semichips.org), a consortium of semiconductor companies.  The ITRS provides research and development guidelines for people working in both industry and academia to ensure that future technological challenges can be met.  Electrochemistry is used for Interconnect fabrication by Cu electrodeposition.  In addition, Cu and Ta chemical mechanical planarization (CMP) are both essentially controlled corrosion processes.

 

Class Time:    TTh 8:00-9:15, SC 320.

 

Instructor:      Ian Suni (CAMP 236, x4471, isuni@clarkson.edu)

 

Office hours:  MW, 9:00-11:30

 

Course site:    www.clarkson.edu/~isuni/course464.htm

 

Topical Outline:

 

Introduction                                                                Examples from Prof. Suni’s laboratory

            Potentials and Thermodynamics of Cells:                  Chapter 2, Bard and Faulkner

            Kinetics of Electrode Reactions:                                Chapter 3, Bard and Faulkner

            Mass Transfer by Migration and Diffusion:               Chapter 4, Bard and Faulkner

            Basic Potential Step Methods:                                    Chapter 5, Bard and Faulkner

            Potential Sweep Methods:                                          Chapter 6, Bard and Faulkner

            Methods Involving Forced Convection:                     Chapter 9, Bard and Faulkner

            Techniques Based on Concepts of Impedance:          Chapter 10, Bard and Faulkner

 

            Case study:    Cu Electrodeposition into Deep Submicron Interconnects

            Case study:    Water Electrolysis

           

            The Technology and Evaluation of Corrosion:           Chapter 1, Jones

            Pourbaix Diagrams                                                      Chapter 2.2, Jones

            Mixed Potential Theory                                              Chapter 3.3, Jones

            Passivity                                                                      Chapter 4, Jones

            Polarization Methods to Measure Corrosion Rate:     Chapter 5, Jones

            Galvanic and Concentration Cell Corrosion               Chapter 6, Jones

            Pitting and Crevice Corrosion                                                Chapter 7, Jones

            Atmospheric Corrosion and Elevated Temperature Oxidation:

                                                                                                Chapter 12, Jones

            Cathodic Protection:                                                   Chapter 13, Jones

            Coatings and Inhibitors:                                             Chapter 14, Jones

 

Case study:    Cu and Ta Planarization Methods for Deep Submicron Interconnects

            Case study:    Corrosion in Extreme Environments

 

Evaluation Methods:

 

Homework will be assigned but not collected and graded.  Grades will be distributed based on z-scores, which measures the number of standard deviations students perform above or below the means:

 

 

                        Midterm examination  25%

                        Final examination        25%

                        Research paper            25%

                        Research paper            25%

 

Exam Policy:  Open book and notes, no make-up exams.